JPS6237327Y2 - - Google Patents
Info
- Publication number
- JPS6237327Y2 JPS6237327Y2 JP15169981U JP15169981U JPS6237327Y2 JP S6237327 Y2 JPS6237327 Y2 JP S6237327Y2 JP 15169981 U JP15169981 U JP 15169981U JP 15169981 U JP15169981 U JP 15169981U JP S6237327 Y2 JPS6237327 Y2 JP S6237327Y2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- shaft
- plates
- high vacuum
- partition wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000007246 mechanism Effects 0.000 claims description 14
- 238000005192 partition Methods 0.000 claims description 12
- 239000002184 metal Substances 0.000 description 10
- 238000005259 measurement Methods 0.000 description 6
- 238000010884 ion-beam technique Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000000682 scanning probe acoustic microscopy Methods 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Sampling And Sample Adjustment (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15169981U JPS5855358U (ja) | 1981-10-13 | 1981-10-13 | 高真空装置用試料出入機構 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15169981U JPS5855358U (ja) | 1981-10-13 | 1981-10-13 | 高真空装置用試料出入機構 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5855358U JPS5855358U (ja) | 1983-04-14 |
| JPS6237327Y2 true JPS6237327Y2 (en]) | 1987-09-24 |
Family
ID=29944383
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15169981U Granted JPS5855358U (ja) | 1981-10-13 | 1981-10-13 | 高真空装置用試料出入機構 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5855358U (en]) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0355238Y2 (en]) * | 1985-10-02 | 1991-12-09 | ||
| JPH01170900U (en]) * | 1988-05-19 | 1989-12-04 |
-
1981
- 1981-10-13 JP JP15169981U patent/JPS5855358U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5855358U (ja) | 1983-04-14 |
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